Soft X-ray microscopy/lithography branch line at SSRL

• 15 May 1980
• journal article
• Published by Elsevier in Nuclear Instruments and Methods
• Vol. 172  (1-2) , 387-391
• https://doi.org/10.1016/0029-554x(80)90668-0

Abstract

Keywords

• RESIST
• SSRL
• BRANCH LINE
• SEM
• SOFT X RAY
• SAMPLE CHAMBER
• RAY MICROSCOPY/LITHOGRAPHY
• MICROSCOPY/LITHOGRAPHY BRANCH