Low-loss antiresonant reflecting optical waveguide on Si substrate in visible-wavelength region

14 August 1986

journal article
Published by Institution of Engineering and Technology (IET) in Electronics Letters

Vol. 22 (17) , 892-893
https://doi.org/10.1049/el:19860608

Abstract

A low-loss (0.3 dB/cm) antiresonant reflecting optical waveguide on an Si substrate was realised at 0.633 μm wavelength by employing a TiO₂/SiO₂ interference reflector instead of an Si/SiO₂ pair used in the long-wavelength range.

Keywords

ANTIRESONANT REFLECTING OPTICAL WAVEGUIDE
VISIBLE-WAVELENGTH REGION
INTERFERENCE REFLECTOR
LOW LOSS WAVEGUIDES