Photoacoustic microscopy of an integrated circuit
- 15 June 1980
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 36 (12) , 953-954
- https://doi.org/10.1063/1.91662
Abstract
The in-phase and quadrature components of a photoacoustic signal have been used to form images of an integrated circuit with ∼6 μm resolution. These photoacoustic images contain information about subsurface properties of the sample.Keywords
This publication has 6 references indexed in Scilit:
- Scanning photoacoustic microscopy for nondestructive evaluationJournal of the Optical Society of America, 1980
- Subsurface flaw detection in metals by photoacoustic microscopyaJournal of Applied Physics, 1980
- Optoacoustic phase angle measurement for probing a metalApplied Physics Letters, 1979
- Photoacoustic signal changes associated with variations in semiconductor crystallinityApplied Physics Letters, 1979
- Subsurface structures of solids by scanning photoacoustic microscopyApplied Physics Letters, 1979
- Surface and subsurface structure of solids by laser photoacoustic spectroscopyApplied Physics Letters, 1978