Laser sputtering. Part II. The mechanism of the sputtering of Al2O3
- 1 February 1984
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 1 (2-3) , 291-300
- https://doi.org/10.1016/0168-583x(84)90083-1
Abstract
No abstract availableKeywords
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