Modern Experimental Methods for Surface and Thin-Film Chemical Analysis

• 1 August 1978
• journal article
• Published by Annual Reviews in Annual Review of Materials Science
• Vol. 8  (1) , 181-214
• https://doi.org/10.1146/annurev.ms.08.080178.001145

Abstract

Keywords

• THIN FILM
• MASS SPECTROSCOPY
• CHEMICAL ANALYSIS
• ION BEAM
• SECONDARY ION MASS SPECTROMETRY
• MASS SPECTROMETRY