A MoSi₂Schottky diode for bipolar LSI's

• 1 July 1985
• journal article
• Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
• Vol. 32  (7) , 1231-1239
• https://doi.org/10.1109/t-ed.1985.22106

Abstract

Keywords

• ALUMINUM
• HEAT TREATMENT
• ELECTRODES
• SCHOTTKY DIODES
• FABRICATION