Spatially and time-resolved detection of gallium atoms formed in the laser photochemical vapor deposition process of trimethylgallium by laser-induced fluorescence: Decomposition in the adsorbed state
- 1 July 1988
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 64 (1) , 371-374
- https://doi.org/10.1063/1.342489
Abstract
Spatially and time-resolved detection of gallium atoms formed in the excimer-laser photochemical vapor deposition (CVD) process of trimethylgallium at 248 nm was made by the laser-induced fluorescence technique. The result shows the importance of chemically adsorbed species in the photo-CVD process. The presence of a thermally assisted effect in the photochemical decomposition was indicated.This publication has 6 references indexed in Scilit:
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