Characterization of electrically active dopant profiles with the spreading resistance probe

• 31 December 2004
• journal article
• review article
• Published by Elsevier in Materials Science and Engineering: R: Reports
• Vol. 47  (5-6) , 123-206
• https://doi.org/10.1016/j.mser.2004.12.002

Abstract

Keywords

• SPREADING RESISTANCE PROBE
• ACTIVE DOPANT DISTRIBUTION
• CARRIER DEPTH PROFILING
• SHEET RESISTANCE