Selective metalorganic reactive ion etching of molecular-beam epitaxy GaAs/AlxGa1−xAs

• 1 November 1989
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 7  (6) , 1479-1482
• https://doi.org/10.1116/1.584516

Abstract

Keywords

• REACTIVE ION ETCHING
• MOLECULAR BEAM EPITAXY