Integrated silicon flow-direction sensor
- 2 January 1989
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 16 (1-2) , 109-119
- https://doi.org/10.1016/0250-6874(89)80010-1
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Thermal sensors based on the seebeck effectSensors and Actuators, 1986
- Thermal sensors based on transistorsSensors and Actuators, 1986
- An integrated silicon double bridge anemometerSensors and Actuators, 1983
- Monolithic integrated direction-sensitive flow sensorIEEE Transactions on Electron Devices, 1982
- Flow Angle and Shear Stress Measurements Using Heated Films and WiresJournal of Basic Engineering, 1972
- Seebeck Effect in SiliconPhysical Review B, 1955