An Optimum Design of FIB System with a Beam Crossover
- 1 August 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (8A) , L1576-1578
- https://doi.org/10.1143/jjap.27.l1576
Abstract
A study was made to optimize an electrostatic ion optical system with an intermediate beam crossover between two focusing lenses. A description was given of an optimization technique with respect to the relative displacement of the crossover between the two lenses with short working distances. It was shown that a system with the objective lens operated in the bipotential mode had better focusing properties than that in the unipotential mode. Some numerical examples were presented for the high performance lens system designed with this technique.Keywords
This publication has 3 references indexed in Scilit:
- Comparison of optical design approaches for use with liquid metal ion sourcesJournal of Vacuum Science & Technology B, 1987
- A focused ion beam system for submicron lithographyJournal of Vacuum Science & Technology B, 1985
- Emission characteristics of gallium and bismuth liquid metal field ion sourcesJournal of Vacuum Science and Technology, 1979