Abstract
Since the invention of the field ion microscope (FIM) by E. W. Muller1 and the first mass-spectrometric analysis of field ions by Inghram and Gomer,2 these tools for field ionization have been developed considerably, as described in several monographs and summarizing artilces.3–8 Field ion mass spectrometry (FIMS) can analyze solid surfaces with extreme sensitivity. The experimental facilities enable ultimately the identification of single surface particles, which can be correlated to individual surface sites within the atomic scale of a surface. The atom-probe, which was developed by E. W. Müller,9 can now analyze surface particles with high precision in mass resolution.

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