Hydrogen evolution from plasma-deposited amorphous silicon films

• 1 March 1978
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 15  (2) , 302-304
• https://doi.org/10.1116/1.569575

Abstract

Keywords

• HYDROGEN EVOLUTION
• PLASMA DEPOSITED
• DEPOSITED AMORPHOUS
• SILICON FILMS