Microstructural Defects of Device Quality Hot-Wire Cvd Poly-Silicon Films
- 1 January 1999
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Hot-Wire CVD Poly-Silicon Films for Thin Film DevicesMRS Proceedings, 1998
- Device-quality polycrystalline and amorphous silicon films by hot-wire chemical vapour depositionPhilosophical Magazine Part B, 1997
- Purely Intrinsic Poly-silicon Films for n-i-p Solar CellsJapanese Journal of Applied Physics, 1997
- On the Way Towards High Efficiency Thin Film Silicon Solar Cells by the “Micromorph” ConceptMRS Proceedings, 1996