Comments on the paper `Scattering effects in ion beam exposure of photoresist polymer films'
- 1 May 1969
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 2 (5) , 767
- https://doi.org/10.1088/0022-3727/2/5/117
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Scattering effects in ion beam exposure of photoresist polymer filmsJournal of Physics D: Applied Physics, 1968
- Photocontrol of Growth Rate of Thin Polymer Films Formed by Electron BombardmentJournal of Applied Physics, 1963