Novel vertical silicon-membrane structure and its application to Josephson devices

• 1 November 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 10  (6) , 2860-2863
• https://doi.org/10.1116/1.585974

Abstract

Keywords

• JOSEPHSON DEVICES
• NOVEL VERTICAL SILICON
• VERTICAL SILICON MEMBRANE