Magnetic microactuation of torsional polysilicon structures
- 31 May 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 53 (1-3) , 392-397
- https://doi.org/10.1016/0924-4247(96)01138-7
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Microactuators with moving magnets for linear, torsional or multiaxial motionSensors and Actuators A: Physical, 1992
- Electrostatic-comb drive of lateral polysilicon resonatorsSensors and Actuators A: Physical, 1990
- Electrodeposition of magnetic materials for thin-film headsIEEE Transactions on Magnetics, 1990
- Demagnetizing Factors of the General EllipsoidPhysical Review B, 1945