In-situ mass spectrometric study of the gas-phase species involved in CVD of diamond as a function of filament temperature
- 1 May 1995
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 4 (5-6) , 770-774
- https://doi.org/10.1016/0925-9635(94)05302-2
Abstract
No abstract availableKeywords
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