Quantitative Surface Roughness Determination of Materials by AFM: Some Limitations

• 20 August 2002
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 408-412, 239-244
• https://doi.org/10.4028/www.scientific.net/msf.408-412.239

Abstract

Keywords

• ARTIFACTS
• ATOMIC FORCE MICROSCOPE (AFM)
• SPM
• SURFACE ROUGHNESS (SR)
• TEXTURE