Fabrication of optoelectronic devices on AlGaAs using electron beam lithography

• 1 March 1991
• journal article
• Published by Elsevier in Microelectronic Engineering
• Vol. 13  (1) , 193-196
• https://doi.org/10.1016/0167-9317(91)90075-o

Abstract

Keywords

• USING ELECTRON
• OPTOELECTRONIC DEVICES
• ALGAAS USING
• BEAM LITHOGRAPHY
• FABRICATION OF OPTOELECTRONIC