A soft x-ray/EUV reflectometer based on a laser produced plasma source

• 1 October 1992
• journal article
• Published by Elsevier in Journal of X-Ray Science and Technology
• Vol. 3  (4) , 283-299
• https://doi.org/10.1016/0895-3996(92)90016-d

Abstract

Keywords

• REFLECTOMETER
• MONOCHROMATOR
• CONTAMINATION
• LASER
• SOFT
• SOURCE
• SHOT
• DETECTORS
• GRATING