Predicting air flow patterns and particle contamination in clean rooms
- 31 December 1988
- journal article
- Published by Elsevier in Journal of Aerosol Science
- Vol. 19 (7) , 1405-1408
- https://doi.org/10.1016/0021-8502(88)90185-1
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Particulate Contamination and Microelectronics Manufacturing: An IntroductionAerosol Science and Technology, 1986
- The numerical computation of turbulent flowsComputer Methods in Applied Mechanics and Engineering, 1974