Isotropic Stress Measurements in Permalloy Films

Abstract
Isotropic stress measurements in Permalloy films have been carried out as a function of thickness, rate of deposition, and substrate temperature. The measurements were made by clamping one end of a substrate consisting of a thin strip of glass or mica and observing the deflection of the free end during deposition. Results indicate that the stress is independent of thickness in the range 100–2000 A. However, depending upon the values of the other deposition parameters, one may observe either tensile, compressive, or zero stress.

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