Angular-Dependent Sputtering of Copper Single Crystals
- 1 March 1963
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 34 (3) , 690-691
- https://doi.org/10.1063/1.1729332
Abstract
The dependence of the sputtering yield upon the angle of incidence for copper single crystals by bombardment with 20‐keV Ne+, Ar+, and Kr+ ions has been measured. The maxima and minima in this dependence, which have been found, can be correlated to a transparency in different directions of the first few lattice planes. An effective collision diameter deduced from the angular dependence of sputtering by Ar+ ion bombardment on a copper (100) single‐crystal surface was found to be 0.39 Å. This value is 3 times larger than the effective collision diameter calculated from the hard sphere approximation for a Bohr potential, taking into account the thermal motion of the lattice particles.This publication has 3 references indexed in Scilit:
- Collection and sputtering experiments with noble gas ionsNuclear Instruments and Methods, 1961
- Sputtering of copper by bombardment with ions of 5–25 keVPhysica, 1960
- THE RANGE OF ALKALI METAL IONS OF KILOELECTRON VOLT ENERGIES IN ALUMINUMCanadian Journal of Chemistry, 1960