Application of Laser Fluorescence Spectroscopy by Two-Photon Excitation into Atomic Hydrogen Density Measurement in Reactive Plasmas
- 1 January 1990
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 29 (1A) , L154-156
- https://doi.org/10.1143/jjap.29.l154
Abstract
Density profiles of hydrogen atoms in reactive plasmas of hydrogen and methane gases were measured, for the first time, using the laser fluorescence spectroscopy by two-photon excitation of Lyman beta transition and observation at the Balmer alpha radiation. Absolute density determinations showed atomic densities of around 3×1017 m-3, or the degree of dissociation to be 10-4. Densities along the axis perpendicular to the RF electrode showed peaked profiles, which were due to the balance of atomic hydrogen production by electron impact on molecules against diffusion loss to the walls.Keywords
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