Properties of SiO2 on Si after Exposure to 3:1 H 2 + N 2 and NH 3

• 1 December 1986
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 133  (12) , 2549-2554
• https://doi.org/10.1149/1.2108469

Abstract