Depth selective CEMS applied to the examination of the conditions in vacuum systems
- 1 July 1979
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 16 (4) , 1013-1016
- https://doi.org/10.1116/1.570131
Abstract
Depth selective CEMS is used to study surface contaminations on iron in vacuum systems. In an oil-diffusion-pumped system iron carbonate was found after iron was annealed at 750°C for several hours. In a turbopumped system austenite was formed after annealing, following a long pumping period and repeated successful reduction–oxidation cycles. The depth distributions could be determined with rather good accuracy.Keywords
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