Laser Induced Chemical Vapor Deposition of Metals for Electrical Contacts in Semiconductor Processing
- 1 January 1985
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Laser Microchemistry and its Application to Electron-Device FabricationAnnual Review of Physical Chemistry, 1983
- Photodeposition of metal films with ultraviolet laser lightJournal of Vacuum Science and Technology, 1982
- Influence of fluorine substitution on the properties of metal chelate compounds—I Copper(II) chelates of bidentate ligandsJournal of Inorganic and Nuclear Chemistry, 1956