A humidity and hydrogen gas-sensitive polyimide-silicon diode

• 1 June 1993
• journal article
• Published by Elsevier in Sensors and Actuators B: Chemical
• Vol. 14  (1-3) , 617-618
• https://doi.org/10.1016/0925-4005(93)85116-r

Abstract

Keywords

• SILICON DIODE
• HYDROGEN GAS
• GAS SENSITIVE
• SENSITIVE POLYIMIDE
• POLYIMIDE SILICON