An in‐depth study of energy‐dispersive x‐ray spectra

Abstract
A detailed study of energy‐dispersive X‐ray spectra is undertaken. Considerable attention is given to a method for a systematic and accurate description of the K and L spectra; a digital correction for the peak profile is evaluated. The following second order effects and spectral artefacts are investigated: radiative Auger transitions, spectral background components, Raman scattering of X‐rays, silicon escape, fluorescence of the detector materials, and sum peaks.

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