Beamlet steering by aperture displacement in ion sources with large acceleration-deceleration ratio

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Abstract
The steering of ion beamlets by aperture displacement is studied analytically and numerically for the case of triode extractors with large acceleration‐deceleration ratios. Here the acceleration‐deceleration ratio ε is defined by ε≡Va/Vb, where Va and Vb are the potentials applied to the second and third grids of the extractor, relative to the beam forming grid at zero potential. Both slit and round apertures are examined. When the second‐order effects of space charge and potential sag in the extractor are included in the analysis, good agreement with numerical simulations is obtained.

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