Infrared study of aluminum nitride films prepared by ion beam deposition. 1. Effects of film thickness, aging, and moisture
- 1 August 1990
- journal article
- research article
- Published by American Chemical Society (ACS) in Langmuir
- Vol. 6 (8) , 1331-1337
- https://doi.org/10.1021/la00098a001
Abstract
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