Desktop microfabrication - initial experiments with a piezoceramic
- 30 November 1999
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 9 (4) , 434-437
- https://doi.org/10.1088/0960-1317/9/4/322
Abstract
A method for building microstructures from a suspension of micrometre-sized piezoelectric particles by depositing droplets on top of droplets and promoting drying is devised. A micromachined dispensing unit similar to a drop-on-demand inkjet-printer head is used. The relation of the vertical building rate to the ejection frequency and the substrate temperature is established, and a mechanism explaining the tubular structures built is proposed.Keywords
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