Intrinsic stress of magnetron-sputtered niobium films
- 1 November 1979
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 64 (1) , 103-110
- https://doi.org/10.1016/0040-6090(79)90549-2
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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