XYTOLR-A Computer Program for Integrated Circuit Mask Design Checkout
- 1 September 1972
- journal article
- website
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Bell System Technical Journal
- Vol. 51 (7) , 1581-1593
- https://doi.org/10.1002/j.1538-7305.1972.tb02670.x
Abstract
XYTOLR is a computer program which checks integrated circuit mask designs for compliance with design rules such as those which require minimum clearances between diffused and metallized areas. The input is the same machine readable mask description t...Keywords
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