Thin Film Conducting and Semiconducting Resistance Thermometers for Surface Temperature Measurement

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Abstract
The accurate determination of surface temperatures, especially during high conductance processes such as condensation or boiling, without affecting the heat transfer phenomena under study, is a challenging experimental task. The present work describes the fabrication and characteristics of two unique types of surface thermometers produced using microelectronic thin film technology. One uses titanium in a meandering pattern to measure surface average temperatures, while the other, using germanium, was designed for point measurements and rapid transient response. An application to experiments involving dropwise condensation of steam is considered in detail.

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