Thermodynamics of the Si‐N‐O System and Kinetic Modeling of Oxidation of Si3 N 4

• 1 November 1989
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 136  (11) , 3210-3215
• https://doi.org/10.1149/1.2096427

Abstract