Ion projection lithography for vacuum microelectronics

• 1 March 1993
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 11  (2) , 487-492
• https://doi.org/10.1116/1.586847

Abstract

Keywords

• VACUUM MICROELECTRONICS
• ION PROJECTION LITHOGRAPHY
• LITHOGRAPHY FOR VACUUM