Time-resolved study of CO elimination from Mo(CO)6 in SF6-sensitized CO2 laser CVD process
- 1 August 1991
- journal article
- Published by Elsevier in Chemical Physics Letters
- Vol. 182 (5) , 466-471
- https://doi.org/10.1016/0009-2614(91)90109-m
Abstract
No abstract availableKeywords
This publication has 25 references indexed in Scilit:
- Deposits Obtained by SF6-Sensitized CO2 Laser CVD from Mo(CO)6Denki Kagaku oyobi Kogyo Butsuri Kagaku, 1989
- Photochemistry of molybdenum hexacarbonyl in the gas phaseThe Journal of Physical Chemistry, 1989
- Energy disposal in the photofragmentation of W(CO)6: Experimental observations and physical modelsThe Journal of Chemical Physics, 1988
- A time-resolved tunable diode laser study of the photodissociation dynamics of W(CO)6Chemical Physics Letters, 1988
- Recombination of Cr(CO)n with CO: kinetics and bond dissociation energiesJournal of the American Chemical Society, 1988
- Wavelength dependence of excimer laser photolysis of Cr(CO)6 in the gas phase. A study of the infrared spectroscopy and reactions of the Cr(CO)x (x = 5, 4, 3, 2) fragmentsJournal of the American Chemical Society, 1986
- Deposition of refractory metal films by rare-gas halide laser photodissociation of metal carbonylsJournal of Applied Physics, 1986
- Studies on the photochemistry of chromium hexacarbonyl in the gase phase; primary and secondary processesJournal of the American Chemical Society, 1985
- A simple technique to deposit molybdenum thin filmsApplied Physics A, 1982
- Laser photodeposition of refractory metalsApplied Physics Letters, 1981