Polycrystalline CuInSe2 Thin Films for Solar Cells by Three-Source Magnetron Sputtering
- 1 August 1993
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 32 (8B) , L1169
- https://doi.org/10.1143/jjap.32.l1169
Abstract
Polycrystalline CuInSe2 films were deposited in a wide range of Cu/In ratios by three-source magnetron sputtering technique onto soda-lime glass and Mo-coated glass substrates at elevated substrate temperatures. Good run-to-run reproducibility was achieved in our sputtering system using melt-grown polycrystalline selenium target. In-excess films which are desirable for solar cells were obtained in the temperature range of 400 to 500°C. These films showed a preferential (112) orientation of the chalcopyrite structure and possessed an excellent adhesion property to the substrates. Preliminary solar cells with ZnO:Al/CdS/CuInSe2 structure resulted in a conversion efficiency of 6.3% under AM 1.5 illumination.Keywords
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