Substrate surface excitations and ionization of particles sputtered from GaAs
- 15 March 1983
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 42 (6) , 514-516
- https://doi.org/10.1063/1.93987
Abstract
The ionization probabilities of Ga, As, and Zn sputtered from GaAs by He+ and Ar+ ions at different primary ion energies and angles of incidence have been investigated. The data indicate that electronic excitations in the collision cascade are responsible for the ionization of particles sputtered from GaAs. In the ionization process the local atomic order is preserved.Keywords
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