Variable structural order in amorphous silicon
- 15 September 1982
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 26 (6) , 3506-3509
- https://doi.org/10.1103/physrevb.26.3506
Abstract
Raman scattering and optical-absorption spectra in low-pressure, rf-sputtered -Si are shown to exhibit a continuous variation with deposition temperature. A direct correspondence between changes in the inverse width of the TO-like phonon band and the optical gap is observed in sputtered and chemical-vapor-deposited -Si. The results are interpreted in terms of intrinsic changes in network short-range order of -Si with temperature which yield substantial modifications of the vibrational and electronic states.
Keywords
This publication has 9 references indexed in Scilit:
- Structural order in anneal-stable amorphous siliconPhysical Review B, 1982
- Optical absorption in sputtered amorphous phosphorusSolid State Communications, 1981
- Studies of surface, thin film and interface properties by automatic spectroscopic ellipsometryJournal of Vacuum Science and Technology, 1981
- Optical properties and structure of amorphous silicon films prepared by CVDSolar Energy Materials, 1979
- Structural disorder and electronic properties of amorphous siliconPhysical Review B, 1977
- Theory of Short-Range Order and Disorder in Tetrahedrally Bonded SemiconductorsPublished by Elsevier ,1976
- Computer restructuring of continuous random tetrahedral networksPhysical Review B, 1975
- Amorphous germanium I. A model for the structural and optical propertiesAdvances in Physics, 1973
- Raman Spectra of Amorphous Si and Related Tetrahedrally Bonded SemiconductorsPhysical Review Letters, 1971