RBS, ERDA and NR analyses of hard amorphous nitrogen-incorporated carbon films
- 1 March 1994
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 85 (1-4) , 268-271
- https://doi.org/10.1016/0168-583x(94)95825-4
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Characterization of hard amorphous carbon films implanted with nitrogen ionsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
- Graphite-like bonding induced in hydrogenated amorphous carbon films with high nitrogen contentSolid State Communications, 1992
- Internal stress reduction by nitrogen incorporation in hard amorphous carbon thin filmsApplied Physics Letters, 1992
- Doping of amorphous-hydrogenated carbon films by ion implantationDiamond and Related Materials, 1992
- Absolute cross section for hydrogen forward scatteringNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1992
- Properties of nitrogen-doped amorphous hydrogenated carbon filmsJournal of Applied Physics, 1991
- Hard amorphous (diamond-like) carbonsProgress in Solid State Chemistry, 1991
- Structure and bonding studies of the C:N thin films produced by rf sputtering methodJournal of Materials Research, 1990
- Symmetry breaking in nitrogen-doped amorphous carbon: Infrared observation of the Raman-activeGandDbandsPhysical Review B, 1989
- Simultaneous nuclear microanalysis of nitrogen and oxygen on siliconNuclear Instruments and Methods in Physics Research, 1982