Catastrophic Au-Si eutectic formation in certain W/Au metallizations on oxidized silicon wafers
- 1 January 1974
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 20 (1) , 115-122
- https://doi.org/10.1016/0040-6090(74)90039-x
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Control of Resistivity, Microstructure, and Stress in Electron Beam Evaporated Tungsten FilmsJournal of Vacuum Science and Technology, 1973
- Eutectic decomposition in the goldsilicon systemMaterials Science and Engineering, 1971
- Beam-Lead TechnologyBell System Technical Journal, 1966