Application de la gravure ionique a la microelectronique
- 1 December 1974
- journal article
- Published by Elsevier in Microelectronics Reliability
- Vol. 13 (6) , 455-462
- https://doi.org/10.1016/0026-2714(74)90431-4
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Argon ion etching in a reactive gasJournal of Materials Science, 1973
- Effects of an Ion Bombardment on the Characteristics of a Metal/n-GaAs Tunnel ContactJournal of Applied Physics, 1972
- Ion-Beam Techniques for Device FabricationJournal of Vacuum Science and Technology, 1971
- Microtopography of surfaces eroded by ion-bombardmentJournal of Materials Science, 1969
- Electron Resists for Microcircuit and Mask ProductionJournal of the Electrochemical Society, 1969