Integrated circuit design for manufacturing through statistical simulation of process steps
- 1 January 1992
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Semiconductor Manufacturing
- Vol. 5 (4) , 368-372
- https://doi.org/10.1109/66.175369
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Techniques for optimizing statistical simulations (IC processes)Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- FABRICS II: A Statistically Based IC Fabrication Process SimulatorIEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1984
- Statistical Simulation of the IC Manufacturing ProcessIEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1982