The "ISLANDS" method—A manufacturable porous silicon SOI technology

• 1 January 1986
• proceedings article
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• p. 431-434
• https://doi.org/10.1109/iedm.1986.191211

Abstract

Keywords

• SILICON ON INSULATOR
• INTEGRATED CIRCUIT
• FABRICATION
• DIELECTRICS
• SOFT ERROR
• COMPUTER AIDED MANUFACTURING