Annealing effects on multilayered Co/Pt and Co/Pd sputtering films

Publisher Website
Google Scholar
Abstract
Effects of air annealing on magnetic properties and structures of multilayered Co/Pt and Co/Pd sputtering films were studied. The dual-source rf magnetron sputtering method was employed in fabricating the films. The thicknesses of the Co layer and Pt layer of the Co/Pt films were 4.3 and 10.0 Å, respectively: the total thickness was 4300 Å. The thicknesses of Co layer and Pd layer of the Co/Pd films were 3.6 and 11.8 Å, respectively: the total thickness was 5600 Å. Residual magnetizations and coercivities of the Co/Pt and Co/Pd films increased with air-annealing at 250–350 °C for 30 min to 2.5–3 kG and 2–3 kOe, respectively. The increases were observed only during air annealing, but not in vacuum annealing. Saturated magnetizations and intensities of the superlattice x-ray peak decreased uniformly relative to annealing temperature.