Removal of nonperiodic structures from a periodic image by means of spatial filtering
- 30 June 1971
- journal article
- Published by Elsevier in Optics Communications
- Vol. 3 (4) , 251-253
- https://doi.org/10.1016/0030-4018(71)90016-2
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Inspection of integrated circuit photomasks with intensity spatial filtersProceedings of the IEEE, 1969