Helium microprobe analysis of nickel silicide diodes
- 1 December 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 29 (3) , 515-520
- https://doi.org/10.1016/0168-583x(87)90062-0
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Elemental mapping with the Karlsruhe nuclear microprobeNuclear Instruments and Methods in Physics Research, 1982
- Semiconductor analysis with a channeled helium microbeamNuclear Instruments and Methods in Physics Research, 1981
- Proton microbeams, their production and useJournal of Radioanalytical and Nuclear Chemistry, 1972